MEAglow (Hollow Cathode Plasma Source)
The Next Generation Plasma Source
Upgrade your Plasma Source today!!!
Mounted on an NW50 (KF50) vacuum flange, the 50 series Hollow Cathode
source is capable of being housed in an NW50 nipple. Widely used for ALD, it features:
l300 or 600 Watt RF or DC operation.
l316 Stainless steel cathode construction (other materials on demand) water cooled.
lWide range of gas usage.
lLow oxygen contamination (no dielectric windows).
lHigh electron density – similar to or higher than inductively coupled and microwave plasma sources.
lWide range of operating pressures (eg. from 100 mTorr to >10 Torr).
lLow plasma damage.
lGases to date: NH3, N2, H2, Ar, O, NO, others possible depending on material atibility.