MEAglow (Hollow Cathode Plasma Source)
The Next Generation Plasma Source
Upgrade your Plasma Source today!!!
For the UHV series, 3 and 3/8” and 4 and 5/8” conflat vacuum flanges are most ommon, but other sizes are made on request.
These Hollow Cathode plasma sources are often used for ALD equipment conversions, but also for homemade ALD systems.
l300 or 600 Watt RF or DC operation.
l316 Stainless steel cathode construction (other materials on request) water cooled.
lWide range of gas usage.
lLow oxygen contamination (no dielectric windows).
lHigh electron density – similar to inductively coupled sources.
lWide range of operating pressures (eg. from 100 mTorr to >10 Torr).
lLow plasma damage.
lCustomized solutions available.